AlTi SERIES ALLOY SPUTTERING TARGET, WEAR RESISTANT AlTi SERIES ALLOY HARD FILM AND FORMATION OF THE FILM

摘要

PROBLEM TO BE SOLVED: To improve the hardness, oxidation resistance, adhesion with a base material or the like of a film formed on a cutting tool, a sliding member, a metal working tool or the like, to provide it with balanced characteristics, to execute stable film formation and to improve the service lives of the tools by allowing a sputtering target to have a specified compsn. ;SOLUTION: This AlTi series alloy sputtering target is the one having a compsn. of AlxTi1-x-ySiy, where (x) and (y) respectively satisfy 0.05≤x≤0.7, and 0.1y≤0.25 and obtd. by powder metallurgy. The AlTi series alloy hard film is preferably the one in which the compsn. of a hard film obtd. by subjecting the AlTi series alloy target obtd. by powder metallurgy to sputtering is composed of (AlxTi1-x-ySiy) N, where (x) and (y) respectively satisfy 0.05≤x≤0.7, and 0.1y≤0.25. Ti powder, Si powder and Al powder respectively of ≤150 μm average particle size as the raw material powder are blended to prescribed ratios and are mixed by a ball mill and dried to form into a powdery mixture.;COPYRIGHT: (C)2000,JPO