Formation manner of AlTi based alloy sputtering target and abrasion resistance AlTi based alloy hard anodic oxide coating and the same membrane

摘要

Abstract Topic Cutting tool, in slide member and metal processed tool etc formationHardness (abrasion resistance) of the membrane which it does, fit with the oxidation resistance and the basic materialAs it improves Characteristic and the like, the property which balance is taken preparationThe obtaining and formation of the membrane which is stabilized the tool etc which formed the said membraneIt improves life. Solutions Al _{xTi1xyzM yR z} (1 genera of element which it does, as for M it chooses from Si, Cr, W and MoAbove, as for R rare earth such as Y, Ce, La and misch metal1 genera or more of element which is chosen from the element, 0.05x0.7, 0.02y0.25 and 0.0005z0.05) the AlTi based alloy sputtering target which isAnd the abrasion resistance AlTi based alloy hard anodic oxide coating which consists of the same composition.