MAGNESIUM OXIDE FILM FOR ALTERNATING CURRENT TYPE PLASMA DISPLAY PANEL, AND MANUFACTURE THEREOF, AND ALTERNATING CURRENT TYPE PLASMA DISPLAY PANEL AND DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a film capable of restricting the adsorption of the impurity gas as a protecting film by controlling the oxygen partial pressure in a specified range and board temperature at the specified value or less at the time of forming a magnesium oxide film on a board with electron beam deposition. ;SOLUTION: Oxygen partial pressure is set at 1×10-5-1×10-4 Torr, and board temperature is set at 250°C or more. A discharge sustain electrode 10 and a dielectric layer 2 are formed on a front glass board 1 of a front panel 21 of an alternating current type plasma display panel, and set in an electron beam deposition device. The electron beam deposition device is evacuated, and the front glass board 1 is heated by an infrared heating device. When degree of vacuum achieves the predetermined value, oxygen gas is added at the predetermined value of pressure, and the MgO raw material is dissolved by the electron beam so as to start the deposition. The front glass board 1 is heated at a high temperature more than the predetermined value, and a protecting film 3 of MgO having several thousands angstrom of thickness is deposited onto the dielectric layer 2.;COPYRIGHT: (C)2000,JPO