METHOD FOR MEASURING THERMAL CONDUCTIVITY OF THIN FILM ON SUBSTRATE BY OPTICAL HEATING ANGSTROM METHOD, AND SAMPLE USED FOR MEASUREMENT THEREIN

摘要

PROBLEM TO BE SOLVED: To easily and precisely measure thermal conductivity of a thin film on a substrate by an optical heating angstrom method, and to provide a sample used for measurement of the thermal conductivity. ;SOLUTION: A thin film 3 sufficiently thinner than a substrate 2 is formed partially on the one small substrate 2 to measure thermal diffusivity D1 of the part of the substrate 2 itself and apparent thermal diffusivity D12 of a thin film-formed part of the substrate 2 by an optical heating angstrom method, and thermal conductivity of the thin film 3 is calculated based on a measured result therein. A sample is constituted by forming partially the thin film 3 sufficiently thinner than a thickness of the substrate 2 on the plate-shaped or cylindrical substrate 2, by forming a light receiving thin film on the whole face of the substrate 2 including the thin film 3, and by providing thermocouples 6 respectively in positions facing on the substrate 2 via a boundary of the thin film 3 or the thickness of the substrate 2, or in positions separated from the boundary of the thin film 3 on the substrate 2 and symmetrical via the boundary.;COPYRIGHT: (C)2000,JPO