METHOD FOR MEASURING ELASTIC MODULUS OF THIN FILM SAMPLE WITH DUAL SECTION, METHOD MEASURING FOR THERMAL EXPANSION MODULUS OF THIN FILM SAMPLE WITH DUAL SECTION, THIN FILM SAMPLE FOR MEASURING ELASTIC MODULUS AND HERMAL EXPANSION MODULUS AND APPARATUS FOR MEASURING ELASTIC MODULUS AND THERMAL EXPANSION MODULUS

摘要

The present invention relates to a method for obtaining the modulus and thermal expansion coefficient of the thin film sample , more specifically, the width ( width) W ₁ in the first section (section) and width ( width) W ₂ one having a second section (section) is added to the test piece of the load on the way to measure the elastic modulus and thermal expansion coefficient of a thin film specimen in reliability with one of two different experiments , by measuring the strain in each of the section (section) via a single experiment . The present invention also relates to a thin-film specimen and a measuring device used in the method described above . ;