Measurements of Thermal Conductivity of Diamond Thin Films by the ac CalorimetricMethod

摘要

High thermal conductivity is one of the most interesting physical properties ofdiamond, when the potential applications of CVD diamond thin films in microelectronics are considered. In the report the authors describe the construction of a measuring system designed for the determination of the thermal diffusivity in thin films. The method is applied both to free standing films and to thin films deposited on various substrates. Reference measurements for metal thin films with well known thermal conductivities are also performed. The chosen method seems to work well for the free standing diamond and metal films, where as in the case of the thin films on substrates, the technique has to be developed further in order to increase the reliability of the method.