METHOD AND SYSTEM FOR MANUFACTURING SEMICONDUCTOR DEVICE, COMPUTER READABLE RECORDING MEDIUM HAVING CONTROL PROGRAM FOR SEMICONDUCTOR MANUFACTURING SYSTEM RECORDED THEREON AND DATA RECORDING MEDIUM USED FOR CONTROLLING SEMICONDUCTOR DEVICE MANUFACTURING SYSTEM

摘要

PROBLEM TO BE SOLVED: To manufacture a microminiaturized semiconductor device without narrowing the control range of a manufacturing apparatus by linking a manufacturing condition described as a function of a process name of control with a measurement result to form a new manufacturing condition.;SOLUTION: First, a manufacturing flow wherein manufacturing process names and preceding measuring process names are arranged in the processing order, is made in a flow making part 20. Then, a manufacturing condition described as a function of a process name of a preceding measurement is set as a manufacturing process name in a link information setting part 21. Continuously, a preceding measurement result is linked with a manufacturing condition described as a function of a process name of a preceding measurement to form a new manufacturing condition in a manufacturing condition forming part 22. Further, a manufacture parameter is calculated from the new manufacturing condition according to the measurement result in a manufacture parameter calculating part 23. Then, a semiconductor device is manufactured in a manufacturing apparatus group 7 by using the manufacture parameter.;COPYRIGHT: (C)2000,JPO