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SPUTTER-ION PUMP

机译:离子泵

摘要

PROBLEM TO BE SOLVED: To prevent the effects of magnetic field in the radial direction, the effects of electric field generated by an electrode and the effects of released gas from a permanent magnet by arranging a positive electrode between two negative electrodes, and forming the positive electrode from a magnet wherein a center hole and at least two holes, which are arranged at an equal angular interval with respect to the center hole and have the same inside diameter. ;SOLUTION: Each negative electrode 1 is equipped with an opening 1a at its center, and a positive electrode 2 is so formed as to have a center hole 2a and multiple holes 2b which are arranged at an equal angular interval on the same circumference in the radial direction from the center axis of the center hole 2a and extend vertically, and to impart the same inside diameter for the holes 2b. The positive electrode 2 is composed as a multi-cell anode, the multiple holes 2b are arranged at an equal angular interval on the same circumference in the radial direction from the center axis line of the center hole 2a, a conductive porous shield cylindrical member 3 formed from a nonmagnetic material is inserted into the center hole 2a concentrically with the center axis of the center hole 2a, and the inside surface of the holes 2b and the like are covered with a conductive non-magnetic material 4 or the like.;COPYRIGHT: (C)1999,JPO
机译:解决的问题:为了防止径向磁场的影响,通过在两个负电极之间布置一个正电极并形成正电极,可以防止电极产生的电场的影响以及永磁体释放的气体的影响。电极由磁体构成,其中,中心孔和至少两个孔相对于中心孔以相等的角度间隔布置并且具有相同的内径。 ;解决方案:每个负极1的中央均设有一个开口1a,而正极2则形成为具有一个中心孔2a和多个孔2b,它们以相等的角度间隔排列在电极的相同圆周上该孔从中心孔2a的中心轴线开始沿径向方向延伸并垂直延伸,并赋予孔2b相同的内径。正极2由多电池阳极构成,多个孔2b从中心孔2a的中心轴线在径向上以相同的角度间隔在径向上的相同圆周上布置,导电多孔屏蔽圆筒形构件3将由非磁性材料形成的材料以与中心孔2a的中心轴线同心的方式插入到中心孔2a中,并且孔2b等的内表面被导电性非磁性材料4等覆盖。 :(C)1999,日本特许厅

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