Microprobe chip for detecting evanescent waves and method for making the same, probe provided with the microprobe chip and method for making the same, and evanescent wave detector, nearfield scanning optical microscope, and information regenerator provided with the microprobe chip

摘要

A microprobe chip for detecting evanescent waves includes a photoconductive material and a substrate for supporting the photoconductive material. The photoconductive material is connected to electrodes formed on the substrate.;A method for making a microprobe chip for detecting evanescent waves includes the following steps of: forming a film comprising a photoconductive material on a peeling layer of a first substrate, the film having a shape of the microprobe chip; and transferring the film on the peeling layer onto a junction layer provided on a second substrate.;A method for making a probe provided with a microprobe chip for detecting evanescent waves includes the following steps of: forming a film comprising a photoconductive material and having the shape of the microprobe chip on a peeling layer of a first substrate; forming a thin film cantilever on a second substrate; and transferring the film on the peeling layer onto a junction layer formed on the thin film cantilever.