Method for measuring argon impurities contained in high-purity oxygen using oxygen triple point and solid oxygen -phase change and low-temperature chamber

摘要

In the present invention, by analyzing the content of impurities except the argon impurities contained in the measurement sample by the conventional chemical analysis method, the temperature of the high purity measurement sample is lowered to the coagulation temperature or less, , And then the temperature of the high-purity measurement sample was continuously lowered to measure the temperature in accordance with the change of the - phase, which occurs as the liquid turns into a solid. The temperature difference between the reference sample and the measurement sample The present invention provides a method for measuring an argon impurity contained in high-purity oxygen by using an oxygen triple point and a solid oxygen -phase change capable of relatively measuring the content of impurities.;Further, in order to achieve such a measuring method, the present invention provides a vacuum enclosure capable of opening and closing with a vacuum pump (11), first and second radiant heat blocking containers (20a, A sample container 30 installed in a sealed state inside the first radiation blocking container 20a to receive a sample from the outside of the vacuum container 10, And measuring means (31) and a heating means (32) provided around the sample vessel (30) so as to measure the concentration of argon impurities contained in the high purity oxygen using the oxygen triple point and the solid oxygen The present invention is to provide a low-temperature thermostat using the above-