Semiconductor device having larger contact hole area than an area covered by contact electrode in the hole

摘要

There is disclosed an active matrix liquid crystal display comprising pixels having an improved aperture ratio. A metallization layer makes contact with an active layer through openings. Inside the openings, the active layer is patterned into the same geometry as the metallization layer. That is, the active layer is patterned in a self- aligned manner according to the pattern of the metallization layer. This can enlarge the contact area. Also, the metallization layer does not required to be specially patterned for making contacts. A high aperture ratio can be obtained.