首页> 外国专利> Semiconductor device having a drain electrode contacting an epi material inside a through-hole and method of manufacturing the same

Semiconductor device having a drain electrode contacting an epi material inside a through-hole and method of manufacturing the same

机译:具有在通孔内部接触epi材料的漏极的半导体器件及其制造方法

摘要

Provided is a semiconductor device including a substrate in which an insulation layer is disposed between a first semiconductor layer and a second semiconductor layer, a through-hole penetrating through the substrate, the through-hole having a first hole penetrating through the first semiconductor layer and a second hole penetrating through the insulation layer and the second semiconductor layer from a bottom surface of the first hole, an epi-layer disposed inside the through-hole, a drain electrode disposed inside the second hole and contacting one surface of the epi-layer, and a source electrode and a gate electrode which are disposed on the other surface of the epi-layer.
机译:提供一种半导体装置,其包括:基板,其中绝缘层设置在第一半导体层和第二半导体层之间;贯通孔,贯通该基板;以及,贯通孔具有贯通第一半导体层的第一孔;和从第一孔的底面穿过绝缘层和第二半导体层的第二孔,设置在通孔内的外延层,设置在第二孔内并与外延层的一个表面接触的漏电极以及布置在外延层的另一表面上的源电极和栅电极。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号