Black nitriding silicon quality sintering body and the production manner

摘要

PURPOSE: To reduce the cumulative reflectance of visible and ultraviolet rays by including specific amounts or more of one or several kinds of Si₃N₄ and sialon and further prescribed amounts of a colorant and a color tone modifier. ;CONSTITUTION: One or several kinds of Si₃N₄ powder (containing a sintering assistant such as Y₂O₃) and sialon powder (containing the sintering assistant), one or several kinds of colorants such as TiC, NbC or ZrC and one or several kinds of color tone modifiers such as V and Cr respectively having ≤10μm average particle diameter are mixed at a specific weight ratio and an organic binder and water are further added to the resultant mixture. Kneading is then carried out to provide a slurry, which is dried, granulated and press formed. The formed compact is subsequently heated under no pressure or under ≤10kgf/ cm² in an N₂ atmosphere and sintered at 1700-1850°C to afford the objective black Si₃N₄-based sintered compact, containing ≥90wt.% Si₃N₄ and sialon, 0.2-5wt.% colorant and 0.2-5wt.% color tone modifier and having ≤15% cumulative reflectance of visible and ultraviolet rays, ≥8×10⁴kgf/cm² Young's modulus and ≤2.5×10^-6/°C thermal expansion coefficient (at 20-100°C).;COPYRIGHT: (C)1994,JPO&Japio