High frequency inductive coupling plasma mass spectrometer

摘要

PURPOSE: To remove clogged materials from meshes by issuing control signals to a mass flow controller from an operation/control unit when a nebulizer starts to be blocked up, and supplying argon gas to the nebulizer at a large flow rate or in a pulsating current. ;CONSTITUTION: When a nebulizer 5 starts to be blocked up, pressure of argon gas flowing in a passage between a mass flow controller 21 and the nebulizer 5 is increased, and a flow rate of the gas flowing in the passage also starts to be decreased. Thereby, when an operation/control unit 22 judged from a pressure signal detected by a pressure gage 23 and a flow rate signal detected by a flow meter 24 that the nebulizer 5 started to be blocked up, a large flow rate signal or a pulsating current signal is issued to the controller 21. Thereby, since the argon gas starts to be supplied to the nebulizer 5 at a large flow rate or in a pulsating current, clogged materials are be removed from meshes in the nebulizer 5, so that a damage caused to the nebulizer can be reduced.;COPYRIGHT: (C)1993,JPO&Japio