Anisotropic thin film evaluation method, evaluation device and record media

摘要

PROBLEM TO BE SOLVED: To determine the dielectric constant, film thickness and the direction of the main dielectric constant coordinates of an anisotropic portion and the dielectric constant and film thickness of an isotropic portion for an anisotropic sample thin film at a high speed.;SOLUTION: The light in the fixed polarized state is fed to a sample 9 from a light source 4 at a fixed angle, and the incident direction dependency of the polarized state of the reflected light generated at this time is measured by in-plane-rotating the sample 9 around a measurement point. The phase difference component for the incident azimuth and the Fourier coefficient of the amplitude ratio component are calculated from the measured value of the incident direction dependency of the polarized state of the reflected light. The film thickness, dielectric constant tensor and the tilt angle of main dielectric constant coordinates of an anisotropic portion and the film thickness and dielectric constant of an isotropic portion are determined from the Fourier coefficient, the difference between the maximum value and minimum value of the phase difference component and the difference between the maximum value and minimum value of the amplitude ratio component.;COPYRIGHT: (C)2000,JPO