THIN FILM MAGNETIC HEAD, MAGNETIC DISK DEVICE USING THE HEAD AND MANUFACTURING METHOD OF THIN FILM MAGNETIC HEAD

摘要

PROBLEM TO BE SOLVED: To provide a thin film magnetic head which is suitable for high speed transfer, that is, high frequency recording and suitable for high density recording. ;SOLUTION: In this thin film magnetic head having an upper magnetic core and a lower magnetic core, a layered film consisting of a soft magnetic film 71 and a non-magnetic film 72 which has resistivity higher than that of the soft magnetic layer is formed by electroless plating on the upper magnetic core 7 and/or the lower magnetic core. This manufacturing method of thin film magnetic head comprises a stage of covering the part other than the part where the magnetic core is formed on a substrate with photoresist, a stage of depositing the first layer of the magnetic core of the soft magnetic film only on the part which is free from the photoresist by immersing the substrate in the electroless plating bath, a stage of depositing the second layer of the magnetic core of the high resistivity film by immersing the substrate in the electroless plating bath for forming the high resistivity film, a stage of subsequently depositing the third layer of the magnetic core which is a soft magnetic film on the second layer of the magnetic core by immersing the substrate in the electroless plating bath and a stage of removing the photoresist.;COPYRIGHT: (C)2001,JPO