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Real time process control of optical components using linearly swept tunable laser

机译:使用线性扫频可调谐激光器对光学组件进行实时过程控制

摘要

A system and method for real time process control, using a linearly swept tunable laser, which allows high speed in-situ monitoring and control of wavelength-specific properties of optical components. The invention comprises scanning an optical component with a high speed, high linearity tunable laser, and detecting optical output from the component during the scanning. Preferably, the invention also includes adjusting or controlling the optical properties of the component during scanning, according to detected optical output from the component. The invention is embodied in a process control system comprising a high speed, high linearity, tunable operatively coupled to an optical component which in turn is operatively coupled to an optical detector. A system control processor is operatively coupled to the tunable laser and detector. A processing control unit is associated with the optical component and is operatively coupled to the system control processor. In operation, the optical component is scanned by the tunable laser, and real time process control of one or more wavelength specific properties of the optical component may be carried out according to feedback from the optical detector and process control unit.
机译:一种使用线性扫描可调谐激光器进行实时过程控制的系统和方法,它可以进行高速原位监测和控制光学组件的特定波长特性。本发明包括用高速,高线性度的可调谐激光器扫描光学部件,以及在扫描期间检测来自该部件的光学输出。优选地,本发明还包括根据检测到的来自组件的光学输出,在扫描期间调节或控制组件的光学特性。本发明体现在一种过程控制系统中,该过程控制系统包括可操作地耦合到光学部件的高速,高线性度,该光学部件又可操作地耦合到光学检测器。系统控制处理器可操作地耦合到可调激光器和检测器。处理控制单元与光学部件相关联并且可操作地耦合到系统控制处理器。在操作中,光学组件由可调谐激光器扫描,并且可以根据来自光学检测器和过程控制单元的反馈来执行光学组件的一种或多种波长特定特性的实时过程控制。

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