首页> 外国专利> - Fe-Ni ALLOY FOR SHADOW MASK HAVING EXCELLENT PROPERTIES IN ETCHING WORKABILITY METHOD FOR OBSERVING INCLUSIONS AND METHOD FOR DETERMINING THE UNIFORMITY OF HOLES

- Fe-Ni ALLOY FOR SHADOW MASK HAVING EXCELLENT PROPERTIES IN ETCHING WORKABILITY METHOD FOR OBSERVING INCLUSIONS AND METHOD FOR DETERMINING THE UNIFORMITY OF HOLES

机译:-具有优异特性的阴影掩膜用铁镍合金在可观察性的刻蚀可加工性方法和确定孔的均匀性的方法中

摘要

The present invention provides a material for a shadow mask which is excellent in etching punching property without deviation of electron beam transmission pore diameter during etching processing.;The present invention relates to a steel sheet comprising 34 to 38% of Ni and 0.5% or less of Mn and having a balance of Fe and inevitable impurities or accompanying elements, wherein C is not more than 0.10%, Si is not more than 0.30%, Al is not more than 0.30% 0.005% or less, and P: 0.005% or less. When the surface of the material is immersed in a 3% nitric acid-ethyl alcohol solution at 20C for 30 seconds after mirror polishing, the diameter of the Fe-and an etching hole having a diameter of 10 to 20 m and a diameter of 10 to 20 m, and an etching hole having a diameter of 10 m to 10 m. The present invention also provides a simple observation method for the presence of minute inclusions or precipitates in the Fe-Ni based alloy material and a method for discriminating the hole diameter uniformity when the electron beam penetrating hole is drilled by etching.
机译:本发明提供一种荫罩用材料,该荫罩用材料的蚀刻冲孔性优异,并且在蚀刻处理过程中不会发生电子束传输孔径的偏差。 Mn,具有Fe和不可避免的杂质或伴生元素的余量,其中C不大于0.10%,Si不大于0.30%,Al不大于0.30%0.005%以下,P:0.005%或减。镜面研磨后,将材料的表面在20%的温度下浸入3%的硝酸-乙醇溶液中30秒,则Fe的直径和蚀刻孔的直径为10至20 m,直径为10蚀刻孔的直径为10至10m,蚀刻孔的直径为10m至10m。本发明还提供了一种用于在Fe-Ni基合金材料中存在微小夹杂物或析出物的简单观察方法,以及一种用于在通过蚀刻来钻通电子束穿透孔时辨别孔径均匀性的方法。

著录项

  • 公开/公告号KR20010098399A

    专利类型

  • 公开/公告日2001-11-08

    原文格式PDF

  • 申请/专利权人 사카모토 다까시;

    申请/专利号KR20010011647

  • 发明设计人 기타요시히사;하타노다카츠구;

    申请日2001-03-07

  • 分类号H01J9/02;

  • 国家 KR

  • 入库时间 2022-08-22 01:12:40

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