PREPARATION METHOD OF TITANIUM DIFFUSION LITHIUM TANTALATE FOR OPTICAL WAVEGUIDE

摘要

PURPOSE: A preparation method of titanium diffusion lithium tantalate for an optical waveguide is provided to easily form a polarization inversion layer through a re-poling process of LiTaO3. CONSTITUTION: First, Ti is diffused under the condition of temperature of 950-1050 deg.C, period of 1.5-10h, deposition thickness of 200-1000 angstrom and Ar atmosphere, and then is cooled by room temperature under O2 atmosphere, thereby being diffused into a LiTaO3 single crystal. Then, the Ti diffused LiTaO3 is heated by 640-680 deg.C with heating rate of 120-150 deg.C/h under the state that 3-5 V/cm is applied to a Pt electrode for 30min-1.5h, and then is cooled by room temperature with cooling late of 120-150 deg.C/h, thereby being re-poled. Finally, the re-poled LiTaO3 is heated less than 610-620 deg.C for 10min-1h to form a polarization inversion layer.