DEVICE FOR PHOTOLUMINESCENT CHART-MAKING OF SEMICONDUCTOR PLATES ( VERSIONS )

摘要

FIELD: non-destructive testing. SUBSTANCE: device is supplemented with rotary table carrying microscopic stage. Photoluminescence sensor includes flat inclined mirror with hole for passage of laser beam placed above objective lens. Focus of objective lens is optically aligned with photodetector via inclined mirror and condenser. EFFECT: increased rapid action. 12 cl, 5 dwg