Ferroelectric capacitor device manufacturing method - has ferroelectric layer of varying thickness applied to electrode structure with different height levels

摘要

The manufacturing method has a ferroelectric layer (13) of varying thickness applied to an electrode structure (11) which has at least 2 different height levels, before application of a second electrode structure (12) to the ferroelectric layer. The different height levels are formed in the first electrode structure by formed etched edges, or by providing a step in a barrier layer (14) before deposition of the electrode structure, with a centrifugal coating process used for deposition of the ferroelectric layer.