Method for measuring the topography of a surface with an interferometer with a phase shift

• 1. 一种测量透明物体的旋转式相移干涉仪及测量方法 [P] . 中国专利： CN110375640B . 2020.12.29
• 2. 一种测量透明物体的旋转式相移干涉仪及测量方法 [P] . 中国专利： CN110375640A . 2019-10-25
• 3. method for measuring the topography of a surface with an interferometer with phase shift [P] . 德国专利： DE69516136D1 . 2000-05-11

  机译： 相移干涉仪测量表面形貌的方法

• 4. METHOD FOR SURFACE TOPOGRAPHY MEASUREMENT USING A PHASE SHIFTING INTERFEROMETER [P] . 欧洲知识产权局专利： EP0760085B1 . 2000-04-05

  机译： 相移干涉仪的表面层析成像测量方法

• 5. IMPROVED PHASE SHIFTING INTERFEROMETER AND METHOD FOR SURFACE TOPOGRAPHY MEASUREMENT [P] . 欧洲知识产权局专利： EP0760085A1 . 1997-03-05

  机译： 改进的相移干涉仪和表面层析成像测量方法

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• 1. Design and experiment of electronic speckle shearing phase-shifting pattern interferometer [J] . XU Tian-hua JING Chao JING Wen-cai ZHANG Hong-xia JIA Da-gong and ZHANG Yi-mo College of Precision Instrument Optoelectronics Engineering National Education ministry Key Laboratory of Opto- electronics Information and Technical Science Tianjin University Tianjin 300072 China . 光电子快报：英文版 . 2008,第1期
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