ION RESONANCE AND SCATTERING TECHNIQUES FOR MEASURING SURFACE AND SUBSURFACE TOPOGRAPHY

摘要

Non- focused ion beams may be employed to investigate the surface profile and the shape of microscopic objects or periodic surfaces by using the known stopping powers of ions in solids. The energy spectra of the scattered or reaction ions are recorded as a function of the angles between the beam, the object and the detector, and of the energy of incident ions. The shape parameters may then be determined using computer codes. Presented also are the typical experimental results.