首页>
外国专利>
Semiconductor device simulation method, semiconductor device simulator, computer program for semiconductor device simulation, and method of manufacturing the semiconductor device
Semiconductor device simulation method, semiconductor device simulator, computer program for semiconductor device simulation, and method of manufacturing the semiconductor device
展开▼
机译:半导体器件仿真方法,半导体器件仿真器,用于半导体器件仿真的计算机程序以及半导体器件的制造方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
A simulation method simulates a self-aligned silicide (SALICIDE) process according to heat treatment temperatures and changes in the composition of a silicide film during first and second heat treatments. The simulation method separately simulates silicide reactions in the first and second heat treatments according to species (metal or silicon) diffusing through a silicide, to thereby improve the accuracy of simulations.
展开▼