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Method of fabricating solder-bearing silicon semiconductor device and circuit board mounted therewith

机译:含焊料的硅半导体器件的制造方法和安装有该半导体器件的电路板

摘要

A circuit board mounted with a semiconductor device is fabricated by forming on a silicon substrate at least one first metal layer, overlaying a second metal layer to completely cover the first metal layer, covering the whole surface of the second metal layer with an insulating material, etching the insulating material to open a window at a prescribed region of the surface of the second metal layer, selectively imparting adhesiveness to the portion at the window, adhering solder powder to the adhesive portion, melting the solder powder by heating to form a solder bump, selectively imparting adhesiveness to at least one electrode portion of a wiring board, adhering solder powder to the adhesive portion, melting the adhered solder powder by heating to form a solder bump on the electrode portion, and contacting and fusing the solder bump of the silicon substrate and the solder bump of the wiring board so as to form and maintain a prescribed gap between the silicon substrate and the wiring board.
机译:通过在硅基板上形成至少一个第一金属层,覆盖第二金属层以完全覆盖第一金属层,并用绝缘材料覆盖第二金属层的整个表面来制造安装有半导体器件的电路板,蚀刻绝缘材料以在第二金属层的表面的预定区域处打开窗口,选择性地赋予窗口部分的粘合性,将焊料粉粘附至粘合剂部分,通过加热使焊料粉熔化以形成焊料凸块选择性地赋予配线板的至少一个电极部分以粘附性,将焊料粉粘附至粘附剂部分,通过加热使粘附的焊料粉熔化以在电极部分上形成焊料凸块,并且使硅的焊料凸块接触并熔合基板和布线板的焊料凸点,从而在硅基板和布线之间形成并保持规定的间隙董事会。

著录项

  • 公开/公告号US6221692B1

    专利类型

  • 公开/公告日2001-04-24

    原文格式PDF

  • 申请/专利权人 SHOWA DENKO K.K.;

    申请/专利号US19990382673

  • 发明设计人 TAKASHI SHOJI;TAKEKAZU SAKAI;

    申请日1999-08-25

  • 分类号H01L214/40;H01L214/80;H01L215/00;

  • 国家 US

  • 入库时间 2022-08-22 01:04:31

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