Light-source device and exposure apparatus

摘要

A light-source device can efficiently cool a light source without frequently exchanging an impurity removing filter. The light-source device includes a housing having an outer wall and an inner wall. A portion within the inner wall of the housing is substantially hermetically sealed with respect to a space formed by the outer wall and the inner wall. The device also includes a light source disposed within the inner wall, and an optical member. The light source guides light supplied from the light source to a portion outside of the housing. The device further includes a cooling unit for causing a fluid to flow between the outer wall and the inner wall of the housing to cool the light source.