The x-ray diffraction meter which does not have the manual intervention for deciding, fourier transform or mean value zero conversions the thickness of multiplex non-metallic crystal layer

摘要

(57) Abstract Thickness of many layer of the non-metallic crystal material understands due to the x-ray diffraction technique which does not have manual intervention. Shaking curved line is processed in order to remove main peak, the window. Windowing curved line is smoothed by running average. Smoothing curved line subtraction is done from windowing curved line, gives the curved line of difference. As for curved line of the difference mean value becomes zero, in order to restrain the point of the both ends in zero, is converted. ueruchiuindou is utilized. Fast Fourier transform being applied, you can obtain the curved line of the difference which is converted. Thickness conversion as a result is applied, can obtain the thickness of layer. As an example, GaAsHEMT and silicon germanium thin film structure were utilized. The general signal processing device which has mean value zero movements is utilized.