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X-RAY DIFFRACTOMETER WITHOUT MANUAL INTERVENTION FOR DETERMINING THICKNESS OF MULTIPLE NON-METALLICA CRYSTALLINE LAYERS, FOURIER- AND AVERAGE VALUE ZERO TRANSFORMATIONS
X-RAY DIFFRACTOMETER WITHOUT MANUAL INTERVENTION FOR DETERMINING THICKNESS OF MULTIPLE NON-METALLICA CRYSTALLINE LAYERS, FOURIER- AND AVERAGE VALUE ZERO TRANSFORMATIONS
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机译:无需人工干预的X射线衍射仪即可确定多个非金属结晶层的厚度,傅立叶和平均值零转换
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摘要
An x-ray diffractometry technique finds thickness of multiple layers of non-metallic crystalline material. A rocking curve is windowed to eliminate a main peak. The windowed curve is smoothed. The smoothed curve is subtracted from the windowed curve to yield a difference curve. The difference curve is transformed to make its average value zero and to constrain its endpoints to zero. A Fast Fourier transform is applied to the transformed difference curve. A thickness transform is applied to the result to yield a layer thickness.
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