Survey instrument and its inspection manner of active matrix liquid crystal display substrate and electro-optic element null for survey instrument

摘要

PURPOSE: To accurately detect a defect by conducting the pixel electrode of an active matrix liquid crystal display board with a thin film transparent electrode on the upper surface of an electrooptical element, and receiving the intensity change of the light passed through the element by a photoreceiver. ;CONSTITUTION: The detected light emitted from a light source 1 is illuminated to an electrooptical element 2 via a beam splitter 30. Then, after it is reflected by the optical reflector 9 of the element 2, it is incident to a photoreceiver 3 via the splitter 30, a lens 32 and a zoom lens 35. An A-D converter 41 electrically connected to the photoreceiver 3, an image processor 42, a drive circuit 43 and a CPU 44 are assembled in a controller 40, a display 4 is connected to the processor 42, and an operation board 23 is connected to the CPU 44. The controller 40 converts the intensity of the light received by the photoreceiver 3 to corresponding voltage, displays the intensity, and displays the number, position and type of defects of the board 5 in response to the amplitude of the corresponding voltage on the monitor 4.;COPYRIGHT: (C)1993,JPO