SINGLE-CRYSTAL X-RAY DIFFRACTION SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a highly accurate angle selling method by which the cutting azimuth angle of a plurality of piezoelectric single crystals and a large-diameter Si ingot can be independently and highly accurately set and easily adapting to the the peeling of wafers after cutting can be easily performed.;SOLUTION: Incident X-rays 203 of Kα of copper Cu from an X-ray tube 201 are passed through a slit 202, a reflected by a crystal surface (r) of a lumbered quartz crystal 220 at a point of incidence 204, and enter a scintillation counter 214 which is an X-ray detecting part as reflected X-rays 213. In the lumbered qualtz crystal 206 (207), a UV-setting-type adhesive 208 is applied to a silica glass substrate 205, and the silica glass substrate 205 is mounted to a reference board 228. For adhering a mechanism for determining the target angle of the lumbered qualtz crystal 206 and the lumbered qualtz crystal 206 on the reference board 228, an adhesion fixed area 211 of ϕ20 mm is irradiated, from above the lumbered qualtz crystal 206 for ten seconds, with ultraviolet rays of which the waves are guided by a guide 210 for transmitting ultraviolet rays connected to an ultraviolet generating source 209 and hardened.;COPYRIGHT: (C)2002,JPO