METHOD FOR TESTING SEMICONDUCTOR INTEGRATED CIRCUIT, EQUIPMENT FOR TESTING SEMICONDUCTOR, AND SEMICONDUCTOR INTEGRATED CIRCUIT

摘要

PROBLEM TO BE SOLVED: To shorten the inspection time required for acceleration test at the time of testing a semiconductor integrated circuit including a novolatile memory element.;SOLUTION: The method for testing a semiconductor integrated circuit having a novolatile memory element and a peripheral circuit part other than the novolatile memory element comprises a first step for applying a high voltage to all memory cells in the novolatile memory element and a second step for imparting a test pattern to the peripheral circuit part other than the novolatile memory element while applying a high voltage wherein both steps are performed simultaneously.;COPYRIGHT: (C)2001,JPO