PROBLEM TO BE SOLVED: To realize highly accurate small angle scattering measurement by optimizing both small angle resolution and incident X-ray intensity relative to a sample.;SOLUTION: A multilayer film 1 having an elliptic reflection surface and a spread angle δ of an X-ray is provided. The elliptic reflection surface of the multilayer film 1 has two focuses. When an X-ray source 2 is arranged on one focus A and the X-rays diverging from the X-ray source 2 are reflected by the multilayer film 1, the reflected X-rays are focused on the other focus B. The X-ray source 2 is arranged on one focus A of the multilayer film 1, and the distance L2 from the center position on the reflection surface of the multilayer film 1 to the other focus B (namely, a convergent point of the reflected X-rays) is set so that a convergent angle θc of the X-rays at the focus B becomes roughly twice as large as the spread angle δ. By this formation, both the small angle resolution and the incident X-ray intensity relative to the sample are optimized, to thereby realize the highly accurate small angle scattering measurement.;COPYRIGHT: (C)2001,JPO
展开▼
