Measurement result display method of ultra-small-angle X-ray scattering measurements, and methods of analysis degree of orientation is based on an ultra-small angle X-ray scattering measurement

摘要

PPROBLEM TO BE SOLVED: To provide an analyzing method of the orientation based on ultra-small-angle X-ray scattering measurements capable of easily and accurately evaluating the crystallinity of the orientation sample, by using an X-ray small-angle measuring device of a laboratory level. PSOLUTION: In this analyzing method, the orientation sample is irradiated with X-rays, having a micro focal size in the horizontal direction and infinity height focal size in the vertical direction, the measured scattering line intensity ISBobs/SBis determined by performing the super-small-angle X-ray scattering measurement, while varying the in-plane angle ϕ of the sample; the calculated scattering line intensity ISBcal/SBis determined by substituting the values of σSBq/SBand σSBμ/SBinto a model equation of the scattering line intensity including a term of σSBq/SBand a term of σSBμ/SB; and true values of σSBq/SBand σSBμ/SBare determined by comparing the ISBobs/SBwith the ISBcal/SB. The σSBq/SBis primarily approximated from the ISBobs/SBat the time of scattering angle qSBmax/SB(2θ is maximum), and the σSBμ/SBis primarily approximated from the ISBobs/SBat of scattering of angle q=0 (2θ=0°). By displaying ϕq polar coordinates, the symmetry of crystal and whether a plurality of crystals are included can be analyzed. PCOPYRIGHT: (C)2008,JPO&INPIT