MEASUREMENT RESULT DISPLAY METHOD FOR SUPER-SMALL-ANGLE X-RAY SCATTERING MEASUREMENT, AND ANALYZING METHOD OF ORIENTATION BASED ON ULTRA-SMALL-ANGLE X-RAY SCATTERING MEASUREMENT

摘要

PROBLEM TO BE SOLVED: To provide an analyzing method of the orientation based on ultra-small-angle X-ray scattering measurements capable of easily and accurately evaluating the crystallinity of the orientation sample, by using an X-ray small-angle measuring device of a laboratory level.;SOLUTION: In this analyzing method, the orientation sample is irradiated with X-rays, having a micro focal size in the horizontal direction and infinity height focal size in the vertical direction, the measured scattering line intensity I_obs is determined by performing the super-small-angle X-ray scattering measurement, while varying the in-plane angle ϕ of the sample; the calculated scattering line intensity I_cal is determined by substituting the values of σ_q and σ_μ into a model equation of the scattering line intensity including a term of σ_q and a term of σ_μ; and true values of σ_q and σ_μ are determined by comparing the I_obs with the I_cal. The σ_q is primarily approximated from the I_obs at the time of scattering angle q_max (2θ is maximum), and the σ_μ is primarily approximated from the I_obs at of scattering of angle q=0 (2θ=0°). By displaying ϕq polar coordinates, the symmetry of crystal and whether a plurality of crystals are included can be analyzed.;COPYRIGHT: (C)2008,JPO&INPIT