MEASURING METHOD FOR IMAGE FORMING CHARACTERISTIC, MEASURING DEVICE FOR IMAGE FORMING CHARACTERISTIC, EXPOSURE METHOD, EXPOSURE DEVICE, AND MANUFACTURING METHOD FOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a measuring method for an image forming characteristic, a measuring device for an image forming characteristic, an exposure method, an exposure device, and a manufacturing method for a device, capable of accurately measuring the image forming characteristic of an optical system in a simple constitution.;SOLUTION: The measuring device S for the image characteristic for measuring a numerical aperture of a projecting optical system PL has a mask M for generating diffraction light DL having different incident angles θ on the projecting optical system PL by the illumination of exposure light EL; a detector A capable of detecting the amount of light of the diffraction light DL passed through the projecting optical system PL; and an arithmetic unit CONT for calculating the numerical aperture NA of the projecting optical system PL based on the variation of the amount of light of the diffraction light DL having different incident angles θ detected with the detector A.;COPYRIGHT: (C)2002,JPO