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Silicon wafer including both bulk and SOI regions and method for forming same on a bulk silicon wafer
Silicon wafer including both bulk and SOI regions and method for forming same on a bulk silicon wafer
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机译:包括块状和SOI区域的硅晶片及其在块状硅晶片上形成硅晶片的方法
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摘要
A silicon substrate comprises a silicon-on-insulator (SOI) portion which includes an insulating silicon dioxide layer beneath a device layer. SOI circuit structures, including SOI field effect transistors, are formed in the device layer. The substrate also comprises a bulk portion. Bulk semiconductor circuit structures are formed in wells in the bulk portion. The bulk circuit structures may be coupled to the SOI circuit structures.
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