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Method of making field emitters using porous silicon
Method of making field emitters using porous silicon
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机译:使用多孔硅制造场致发射器的方法
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摘要
A process is provided for forming sharp asperities useful as field emitters. The process comprises patterning and doping a silicon substrate. The doped silicon substrate is anodized. The anodized area is then use for field emission tips. The process of the present invention is also useful for low temperature sharpening of tips fabricated by other methods. The tips are anodized, and then exposed to radiant energy and the resulting oxide is removed.
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