Germanium chloride and siloxane feedstock for forming silica glass and method

摘要

Disclosed is a method of making optical waveguide preforms and optical waveguides which may be drawn to a fiber. A silica forming feedstock which includes a mixture of siloxane and germanium chloride and an optical waveguide preform manufacturing apparatus is also disclosed. Further disclosure includes the mixing prior to deposition and use of high purity siloxane with high purity germanium chloride to produce germanium doped silica. The delivery lines for the feedstock to the deposition side may be heated to 175 DEG C-200 DEG C.