ELEVATOR PLATFORM BUFFER FOR PREVENTING WALK OUT OF WAFER

摘要

PURPOSE: An elevator platform buffering apparatus is provided to prevent a wafer deviation from a cassette due to a vibration by installing a buffering part between an elevator and a platform. CONSTITUTION: An elevator platform buffering apparatus comprises an elevator(20) for moving a wafer cassette up and down, a down platform(30) fixed on the elevator(20), a number of buffering parts(60) installed on the down platform(30) for an absorption of a wafer cassette vibration and an up platform(40) fixed on the buffering parts(60) for stably mounting the wafer cassette. The down platform(30) further includes two pairs of fixing holes for respectively fixing the buffering parts(60). At this point, the buffering parts(60) are made of rubber.