Reticle Sending Apparatus with Fork Arm having Reticle Position Sensing Ability

摘要

PURPOSE: A reticle sending apparatus is provided to prevent a damage on a reticle by installing a position sensing part on a fork arm so as to sense the position of the reticle. CONSTITUTION: A reticle transfer apparatus comprises a reticle library(25) for receiving reticle cassettes(23) stably and respectively fixed with a reticle(21), a fork arm(27) installed for extracting the reticle(21) stably fixed on the reticle cassette(23) using a sending part and a horizontal sending carrier(29) for temporarily holding the reticle(21) before sending a reticle furnace stage. The fork arm further includes a position sensing part(30) for sensing the reticle(21) and the position sensing part(30) installed with a number of photosensors(31).