Reticle Sending Apparatus with Fork Arm having Reticle Position Sensing Ability

摘要

A reticle transfer system includes a fork arm for withdrawing a reticle from a reticle cassette and transferring the reticule to a predetermined position, a linear carrier for temporarily holding the reticle transferred by the fork arm, and a position sensor for detecting the position of the reticle on the fork arm. The position sensor can detect an abnormal loading state of the reticle to prevent the reticle from being damaged. Additionally, an unpredictable error in a linear carrier can be prevented when the reticle is transferred from the fork arm to the linear carrier.