RETICLE SENDING APPARATUS FOR CLEANING RETICLE SIDE SPACE, CAPABLE OF CLEANING THE SIDE SURFACE OF A RETICLE USING A ROTATION BRUSH

摘要

PURPOSE: A reticle sending apparatus for cleaning reticle side space is provided to prevent additional contamination and damage to reticle by automatically cleaning the side surface of the reticle.;CONSTITUTION: A supporting unit(300) supports a reticle. A rotation brush(410) revolves the side surface of the reticle. A driving unit(400) moves according to the side surface of the reticle. A driving unit comprises a rotary motor, a brush guard, and a controller. The rotary motor rotates the rotation brush. The brush guard transfers the rotation brush according to the side surface of the reticle. A controller controls the rotary motor and the brush guard.;COPYRIGHT KIPO 2010