FORK ARM OF RETICLE TRANSFERING APPARATUS

摘要

PURPOSE: A folk arm of a reticle transferring device is provided to prevent a damage of a reticle by detecting accurately an incorrect position of the reticle to stop a reticle transferring operation. CONSTITUTION: Vacuum holes(12) are formed at a right end portion and a left end portion of each branch(16) of a reticle board, respectively. An optical sensor(14) is installed at a left side of the left vacuum hole(12) in order to sense a reticle(70). The branches(16) are connected with a vertical portion(18). An extended portion(18') of the vertical portion(18) is connected with a folk arm connection portion(20). The length of the folk arm connection portion(20) is longer than the length of the branch(16). The reticle board is moved to a left or a right direction since the folk arm connection portion(20) is moved to a left or a right direction. The reticle board is moved to a lower portion of the reticle(70). The reticle(70) is absorbed into the reticle board through an entrance(52) of a reticle box(50).