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Photolithographic exposure unit for e.g. manufacturing DNA chips, scans target areas of biological material selectively with highly-focused flying spot illumination
Photolithographic exposure unit for e.g. manufacturing DNA chips, scans target areas of biological material selectively with highly-focused flying spot illumination
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机译:光刻曝光单元,例如制造DNA芯片,并通过高度聚焦的飞点照明选择性扫描生物材料的目标区域
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摘要
Photolithographic exposure unit for manufacturing DNA chips comprising highly-focused light from a source controlled by a deflection- or positioning unit, directing the light spot onto each intended target location in a defined region, is new. An Independent claim is included for photolithographic exposure of biological materials.
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