Apparatus for the photolithographic illumination of biological substances, useful in the manufacture of DNA chips, includes a micromirror array controlled to produce any given illumination pattern

摘要

Apparatus for the photolithographic illumination of biological substances comprising - 1 light source, an array of more than 100 small mirrors, and a control unit that can control the angle of each mirror independently to produce any given illumination pattern, is new. An Independent claim is also included for a process for the photolithographic illumination of biological substances, comprising arranging the substances on a surface and illuminating them with light reflected from individual controllable mirrors so that each point to be illuminated on the surface receives light from a mirror independently of other points on the surface in a pattern preselected by a control unit.