Micromechanical microwave switch has coefficients of thermal expansion of membrane, beams and substrate and lengths of membrane and beams matched to compensate thermal effects

摘要

The device has membrane bridges clamped at both ends floating above a substrate for changing between transmission and reflection states by voltage application. The ends of the membrane (2) are joined to the ends of two symmetrical floating supporting beams (1), whose other ends are joined to posts (4) attached to the substrate (S). The longitudinal directions of the bridges and beams are mutually inclined and the coefficients of thermal expansion of the membrane, beams and substrate and the lengths of the membrane and beams and their mounting angles are matched to each other to compensate for thermally induced expansion differences.