Micromechanical actuator has cantilever beam with metal coating, at least in some areas that can be heated, where it consists of material with lower coefficient of thermal expansion than metal coating

摘要

The actuator (1) has a substrate (2) and a cantilever beam (3) joined to the substrate at least on one side of a cantilever region or via an armature (4a,4b) at one or more ends. The beam has a metal coating (7a,7b) at least in some areas, in which it consists of a material with a lower coefficient of thermal expansion than that of the metal coating. The beam can be heated in the coated region.