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Production of niobium or tantalum penta-alcoholate for use in chemical vapor deposition, comprises dissolution of the corresponding metal pentachloride at low temperature in alkanol containing excess ammonia
Production of niobium or tantalum penta-alcoholate for use in chemical vapor deposition, comprises dissolution of the corresponding metal pentachloride at low temperature in alkanol containing excess ammonia
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机译:生产用于化学气相沉积的铌或钽五醇盐,包括在低温下将相应的五氯化金属溶解在含过量氨的烷醇中
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摘要
Niobium (V) and tantalum (V) alcoholates (I), produced by dissolving the corresponding metal pentachloride at 0-(-50) deg C under inert gas in 1-5C alkanol containing 5-7 moles ammonia per mol metal pentachloride, are new. Production of niobium (V) and tantalum (V) alcoholates of formula (I) comprises dissolving niobium or tantalum pentachloride with a 1-5C alcohol containing 5-7 moles ammonia per mol metal chloride at 0-(-50) deg C under inert gas. M(OR)5 (I) M = Nb or Ta; and R = 1-5C alkyl.
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机译:铌(V)和钽(V)的醇盐(I)是通过将相应的五氯化金属在惰性气体下于0-(-50)℃下溶解在1-5C链烷醇中制得的,该烷烃中每摩尔金属五氯化物含5-7摩尔氨。新。式(I)的铌(V)和钽(V)醇化物的制备包括在惰性下0-(-50)℃下,将铌或五氯化钽与每摩尔金属氯化物含5-7摩尔氨的1-5C醇溶解。加油站。 M(OR)5(I)M = Nb或Ta; R = 1〜5C烷基。
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