Coating a tool with titanium, zirconium, hafnium, vanadium, niobium, tantalum or chromium carbonitride by chemical vapor deposition comprises increasing the temperature during deposition

摘要

Coating a tool with titanium, zirconium, hafnium, vanadium, niobium, tantalum or chromium carbonitride by chemical vapor deposition using a gas comprising methane, nitrogen and a metal compound comprises starting the deposition at 850-950[deg]C and then increasing the temperature by at least 40[deg]C and continuing the deposition at the increased temperature. Independent claims are also included for: (a) titanium, zirconium, hafnium, vanadium, niobium, tantalum or chromium carbonitride coating deposited on an article, where the coating has a nanocomposite structure comprising crystals with an inhomogeneous element distribution; (b) tool with a coating as above.