METHOD OF OBTAINING CRITICAL STATE OF OXIDATION AND REDUCTION, METHOD OF EVALUATING THE CRITICAL STATE, AND METHOD AND APPARATUS OF FORMING FERROELECTRIC FILM

摘要

PPROBLEM TO BE SOLVED: To obtain critical states of the oxydation and reduction of a prescribed material such as iridium. PSOLUTION: A method of obtaining critical states of the oxidation and reduction comprises a heating process of heating a semiconductor material having a material layer including a substance which shows catalytic action in a reduced state to a prescribed temperature in a reaction furnace for vapor phase deposition, and an oxidation and reduction process of introducing a prescribed oxidant and a gasified prescribed organic solvent at a prescribed ratio into the reaction furnace, with the gasified prescribed organic solvent functioning as a reducing agent in the oxidation and reduction of the prescribed substance. This method allows the critical states of the oxidation and reduction of the prescribed substance on the surface of the material layer to be obtained. PCOPYRIGHT: (C)2003,JPO